Abstract
Ahstract- We investigate the scattering loss in optical intercon-nects comprised of dielectric slab waveguides operated at 1.54 \mu \mathbf{m} source wavelength and exhibiting stochastic sidewall roughness, using the method of finite-difference time-domain (FDTD). Power degradation is numerically computed and compared against an existing analytical solution. Results show correlation between the proposed FDTD method and analytical model. A normalization is enforced based on input power to compensate for physical waveguide parameter