Supercritical fluid immersion deposition: a new process for selective deposition of metal films on silicon substrates

Journal article

Peer reviewed

Chien M Wai, Jeffrey L Young, Xiang-Rong Ye, Yuehe Lin, James S Young and Mark Engelhard

Surface and Coatings Technology, Vol.190(1), pp.25-31

2005

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Title: Supercritical fluid immersion deposition: a new process for selective deposition of metal films on silicon substrates
Creators: Chien M Wai - University of Idaho
Jeffrey L Young
Xiang-Rong Ye
Yuehe Lin - Environmental Molecular Sciences Laboratory
James S Young - Environmental Molecular Sciences Laboratory
Mark Engelhard - Environmental Molecular Sciences Laboratory
Publication Details: Surface and Coatings Technology, Vol.190(1), pp.25-31
Identifiers: 996632087001851
Academic Unit: University of Idaho
Language: English
Resource Type: Journal article