Solvent Immersion Lithography

Journal article

Peer reviewed

Ryan T Kelly, Andreas E Vasdekis, Michael J Wilkins, Jay W Grate, A E Konopka, Sotiris S Xantheas and Tsun-Mei Chang

Lab on a Chip, Vol.14(12), pp.2072-2072

2014

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url

https://doi.org/10.1039/C4LC00226AView

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Title: Solvent Immersion Lithography
Creators: Ryan T Kelly - Environmental Molecular Sciences Laboratory
Andreas E Vasdekis - Environmental Molecular Sciences Laboratory
Michael J Wilkins - Pacific Northwest National Laboratory
Jay W Grate - Pacific Northwest National Laboratory
A E Konopka - Pacific Northwest National Laboratory
Sotiris S Xantheas - Pacific Northwest National Laboratory
Tsun-Mei Chang
Publication Details: Lab on a Chip, Vol.14(12), pp.2072-2072
Identifiers: 996631440301851
Academic Unit: Institute for Health in the Human Ecosystem; Initiative for Bioinformatics and Evolutionary Studies; Physics; Institute for Modeling Collaboration and Innovation
Language: English
Resource Type: Journal article