Resolving Precursor Deligation, Surface Species Evolution, and Nanoparticle Nucleation during Palladium Atomic Layer Deposition

Journal article

Peer reviewed

Peter J Chupas, Jeffrey W Elam, Jeffrey P Greeley, Yu Lei, Joseph A Libera, Bin Liu, Ke-Bin Low, Junling Lu, Jeffrey T Miller, Tianpin Wu, …

Journal of Physical Chemistry C, Vol.117

2013

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https://doi.org/10.1021/jp401196fView

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Title: Resolving Precursor Deligation, Surface Species Evolution, and Nanoparticle Nucleation during Palladium Atomic Layer Deposition
Creators: Peter J Chupas - Argonne National Laboratory
Jeffrey W Elam - Argonne National Laboratory
Jeffrey P Greeley - Purdue University West Lafayette
Yu Lei
Joseph A Libera - Argonne National Laboratory
Bin Liu - Argonne National Laboratory
Ke-Bin Low
Junling Lu - Argonne National Laboratory
Jeffrey T Miller - Argonne National Laboratory
Tianpin Wu - Argonne National Laboratory
Haiyan Zhao - Argonne National Laboratory
Publication Details: Journal of Physical Chemistry C, Vol.117
Identifiers: 996631899801851
Academic Unit: Chemical and Biological Engineering
Language: English
Resource Type: Journal article