Exploring Pore Formation of Atomic Layer-Deposited Overlayers by in Situ Small- and Wide-Angle X-ray Scattering

Journal article

Peer reviewed

Bachir Aoun, Christian P Canlas, Jeffrey W Elam, Saurabh Karwal, Tao Li, Yang Ren, Randall E Winans and Haiyan Zhao

Chemistry of Materials, Vol.28(19), pp.7082-7087

2016

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http://dx.doi.org/10.1021/acs.chemmater.6b03222 View

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Title: Exploring Pore Formation of Atomic Layer-Deposited Overlayers by in Situ Small- and Wide-Angle X-ray Scattering
Creators: Bachir Aoun - Argonne National Laboratory
Christian P Canlas
Jeffrey W Elam - Argonne National Laboratory
Saurabh Karwal - Argonne National Laboratory
Tao Li - Argonne National Laboratory
Yang Ren - Argonne National Laboratory
Randall E Winans - Argonne National Laboratory
Haiyan Zhao - Argonne National Laboratory
Publication Details: Chemistry of Materials, Vol.28(19), pp.7082-7087
Identifiers: 996631937401851
Academic Unit: Chemical and Biological Engineering
Language: English
Resource Type: Journal article