- Title
- Electrical conductivity and photoluminescence of diamond films grown by downstream microwave plasma CVD
- Creators
- B.R. Stoner - North Carolina State UniversityJ.T. Glass - North Carolina State UniversityL Bergman - North Carolina State UniversityR.J. Nemanich - North Carolina State UniversityL.D. Zoltal - California Institute of Technology
- Publication Details
- Journal of electronic materials, Vol.21(6), pp.629-634
- Publisher
- Springer Science and Business Media LLC
- Identifiers
- 997018662701851
- Academic Unit
- Physics
- Language
- English
- Resource Type
- Journal article
Journal article
Electrical conductivity and photoluminescence of diamond films grown by downstream microwave plasma CVD
Journal of electronic materials, Vol.21(6), pp.629-634
06/01/1992
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