Metrics
1 Record Views
- Title
- Critical Issues in MEMS Property Measurement and Variation Measured by Nanoindentation: Error Sources and Uncertainty
- Creators
- Michael R Maughan - University of IdahoDavid F Bahr - Purdue University West Lafayette
- Publication Details
- Journal of Microelectromechanical Systems, Vol.31(2), pp.226-233
- Identifiers
- 996632114701851
- Academic Unit
- Mechanical Engineering
- Language
- English
- Resource Type
- Journal article