An Investigation of Polyoxometalate Hybrid Materials as Patternable Dielectrics and Lithographic Resists

Journal article

Peer reviewed

Brandon Taylor Hardie and Mark Roll

Materials, Vol.10.0(11.0)

2017

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url

http://dx.doi.org/10.3390/ma10111309 View

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Title: An Investigation of Polyoxometalate Hybrid Materials as Patternable Dielectrics and Lithographic Resists
Creators: Brandon Taylor Hardie - University of Idaho
Mark Roll - University of Idaho
Publication Details: Materials, Vol.10.0(11.0)
Identifiers: 996631092301851
Academic Unit: Mechanical Engineering
Language: English
Resource Type: Journal article