Abstract
AbstractNitrogen Trifluoride (NF3) is an inorganic compound widely used in the electronics industry for manufacturing various products, such as semiconductors, solar panels, and touch screens. However, NF3 emissions that accumulate in the atmosphere have 17,200 times the global warming potentials of CO2 over a 100-year time horizon. This study aims to provide economic and environmental impact assessments on the use of NF3. Additionally, a real case study for the Idaho semiconductor facility is used to assess the method and demonstrate the application of this study. The results show that slight reductions in abatement efficiency have dramatic impacts on mitigating greenhouse gas (GHG) emissions. The results also indicate that the cost of abatement is the primary driver of economic impact. It is also found that contaminants (e.g., SF6 and CF4) within the cylinder potentially have more substantial GHG impacts than the actual NF3, owing in part to the relative ease with which NF3 is destroyed through abatement[A1] . Furfural is an organic compound that is widely used in the chemical industry for manufacturing various products, such as pharmaceuticals, pesticides, and solvents. Furfural production from biomass feedstocks can be achieved through various conversion pathways (e.g., pyrolysis or hydrolysis). Sustainability assessments are conducted on a real case study in southern Idaho, to evaluate and verify the methodology and demonstrate the application of this study. The results show that the total cost for furfural production, using pyrolysis and hydrolysis, are approximately $846 and $980 per metric ton, and total emission is 267 and 1,095 kg CO2 eq. per metric ton, respectively.