Tantalum oxide Nanoislands and Continuous films Grown by Atomic Layer Deposition

Abstract

Tantalum oxide Nanoislands and Continuous films Grown by Atomic Layer Deposition

D Zhang, J Wei, S Moore, X Chen, L Bergman, DE Aston and B Pesic

APS March Meeting

01/01/2003

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Title: Tantalum oxide Nanoislands and Continuous films Grown by Atomic Layer Deposition
Creators: D Zhang
J Wei
S Moore
X Chen
L Bergman
DE Aston
B Pesic
Conference: APS March Meeting
Identifiers: 997018236601851
Academic Unit: Physics
Language: English
Resource Type: Abstract